半导体级晶体生长炉KX260MCZ
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| Performance 性能 | |||||||||
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| Typical Ingot Diameter 单晶直径 | 200-400 mm (8-16 in) | ||||||||
| Pull Chamber Door Opening 副室门尺寸 | 508 x 2,362 mm (20 x 93 in) | ||||||||
| Throat Diameter 喉口直径 | 457 mm (18 in) | ||||||||
| Seed Lift Rate 晶升速率 | 0-508 mm/hr | ||||||||
| Seed Jog Speed (Nominal) 籽晶快速提升速率（最大） | 508 mm/min | ||||||||
| Total Crucible Travel 坩锅最大行程 | 280 mm (19.6 in ) | ||||||||
| Crucible Lift Rate 坩锅提升速率 | 0-254 mm/hr | ||||||||
| Crucible Jog Speed (Nominal) 坩锅快速提升速率（最大） | 50.8 mm/min | ||||||||
| Seed Rotation (Reversible) 籽晶旋转速率（可逆） | 0-35 rpm | ||||||||
| Crucible Rotation (Reversible) 坩锅旋转速率（可逆） | 0-20 rpm | ||||||||
| CUPS 主真空泵 | 14,200 l/min (300 cfm) | ||||||||
| (Min. recommended) Aux 辅真空泵 | 1,700 l/min (50 cfm) | ||||||||
| Silicon Charge Capacity硅投料量 | |||||||||
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*Hot Zones available to fit following crucible sizes 热场尺寸取决于坩锅直径 **Charges can be enhanced with Xtramelt? Feeder 使用 Xtramelt? 二次加料系统可提高装料量 |
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Crucible Diameter* 坩埚直径 |
Crucible Height* 坩埚高度 |
Charge Size Cold Pack 冷装投料量 |
Enhanced Charge** 复投装料量 |
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| 28.0 in | 17.0 in | 240 kg | 300 kg | ||||||
| 24.0 in | 16.33 in | 150 kg | 180 kg | ||||||
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