锗单晶生长炉KX100-Ge
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| Performance 性能 | |||||||||
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| Typical Ingot Diameter 单晶直径 | 100-200 mm(4-8") | ||||||||
| Pull Chamber Height 副室高度 | 1750 mm (69”) | ||||||||
| Throat Diameter 喉口直径 | 305 mm (12”) | ||||||||
| Furnace Diameter 炉室内径 | 865 mm | ||||||||
| Seed Lift Rate 籽晶提升速率 | 0-508 mm/hr | ||||||||
| Seed Jog Speed (Nominal) 籽晶快速提升速率（最大） | 508 mm/min | ||||||||
| Total Crucible Travel 坩锅最大行程 | 380 mm (15") | ||||||||
| Crucible Lift Rate 坩锅提升速率 | 0-254 mm/hr | ||||||||
| Crucible Jog Speed (Nominal) 坩锅快速提升速率（最大） | 50.8 mm/min | ||||||||
| Seed Rotation (Reversible) 籽晶旋转速率（可逆） | 0-50 rpm | ||||||||
| Crucible Rotation (Reversible) 坩锅旋转速率（可逆） | 0-20 rpm | ||||||||
| Silicon Charge Capacity硅投料量 | |||||||||
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| Hot zones are available to fit the following crucible sizes. 热场尺寸取决于坩锅直径 | |||||||||
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Crucible Diameter 坩锅直径 |
Crucible Height 坩锅高度 |
Charge Size 投料量 |
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| 20.0 in | 15.0 in | 120 kg | |||||||
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